PMC

(a) Schematic of the optical layout of the soft X-ray microscope beamline XM-2. (a) Bend magnet (in red) and radiation source (green arrow); (b) water-cooled aperture; (c) branchline aperture; (d) mirror box front aperture; (e) mirror horizontal slits; (f′) upper vertical slit; (f′′) lower vertical slit; (g) condenser aperture; (h) condenser zone plate lens; (i) condenser chamber vacuum window and monochrometer pinhole; (j) MZP chamber vacuum window; (k) micro zone plate (objective lens); (l) camera. The mirror is shown in blue and located between (e) and (f′). Figure not drawn to scale. (b) Schematic of the optical layout of XM-2. (a) Source; (b) water-cooled aperture; (c) branchline aperture; (d) mirror box front aperture; (e) mirror horizontal slits; (f′) upper vertical slit; (f′′) lower vertical slits; (g) condenser aperture; (h)–(k) condenser zone plate lens, front pinhole, specimen plane, micro zone plate (objective lens); (l) camera. Figure not drawn to scale. X-ray light path color code: yellow, 0°; green, 1°; red, 3°.

Relative intensities for the Wolter II microscope as a function of condenser focal length with an objective focal length of 500 mm, 750 mm, and 1000 mm. (a) Guide-to-condenser distance GCD = 500 mm; (b) GCD = 1000 mm. Simulations used 10⁶ rays. Here, the working distance is Z_sE. The vertical scale is the same as in for the ease of comparison.

Relative intensity of the Wolter III microscope as a function of condenser focal length with an objective focal length of 500 mm, 750 mm, and 1000 mm. (a) Guide-to-condenser distance = 500 mm; (b) guide-to-condenser distance = 1000 mm. Here, the working distance is Z_sH The vertical scale is the same as in and for the ease of comparison.

Rectangular microchannels from the condenser and the vaporizer, vertical scale in µm.